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Welcome to the Penn State Nanofab Equipment and Process Knowledge Base.  Here you will find equipment information, training videos, and data as well as processing demonstration and information videos.  

NOTE: You must be a facility user or have Penn State access to view these resources.

chemical safety - general lab safety
Safety and Facility User Manual

Here you will find a very in-depth overview of the Nanofabrication Lab at Penn State.  From general information such as facility access for users and visitors to chemical use, safety, storage, and labeling.

knowledge base
Equipment Knowledge Base

Here you will have access to an extensive and searchable amount of information for the following equipment types: characterization, deposition, etching, lithography, furnace, and complex oxide bays.

process of wafer in a nanofab
Process Knowledge Base

The Process Knowledge Base contains information on techniques and processes that require or are utilized by more than one piece of equipment.  There are examples of recipes, tips and tricks, problems and solutions, and much more.

Materials Safety at Fume Hood
Materials and Safety

Information on the nanofab chemical list, safety data sheets, technical data sheets, and materials inventory.

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