The Nanofab has 3 ways to dispense polymers. The most common method is a manual dispense in one of the 4 spin coat benches. The CEE 4500 is an automated method that can dispense and automatically transfer to hot plate ovens. The final method is spray coating, this is ideal for curved substrates.
The Nanofab supplies over 50 polymers, from I-line, e-beam, ultra-thick, and Lift-Off products.
Spin Coat Bench
CEE 4500 Auto Track
Prism Spray Coater
| E-Beam | I-Line | Broad-Band | Lift-Off | Thick | Ancillary |
|---|---|---|---|---|---|
HSQ XR 1541 |
AZ 5214 |
AZ 50 XT |
LOR 2A |
AZ 4620 |
BaRli II |
| PMMA 495 A6 |
AZ NLOF 2020 |
AZ 5214 |
LOR 5A |
AZ 50 XT |
Omni Coat |
| PMMA 495 A9 |
JSR NFR 105G |
AZ NLOF 2020 |
PMGI SF 2 |
BCB 3022-46 |
HMDS |
| PMMA 950 A2 |
Shipley SPR 1805 |
Shipley SPR 1805 |
PMGI SF 5 |
KMPR 1010 |
ProTek |
| PMMA 950 A3 |
Shipley SPR 1813 |
Shipley SPR 1813 |
PMGI SF 6 slow |
SU8 5 |
Surpass 3000 |
| MaN 2401 |
Shipley SPR 1827 |
Shipley SPR 1827 |
PMGI SF 9 |
SU8 10 |
Surpass 4000 |
| MaN 2403 |
Shipley SPR 220.7 |
Shipley SPR 220.7 |
PMGI SF 11 |
SU8 25 |
|
| MMA EL 06 |
Shipley SPR 3012 |
Shipley SPR 3012 |
SU8 50 |
||
| MMA EL 11 |
Shipley SPR 950.8 |
SU8 100 |
|||
| ZEP 520A |
Shipley SPR 955 2.1
|