There are 2 contact print aligners, both made by Karl Suss. The Karl Suss MABA6 Contact Printers use a physical master mask that comes into contact with the substrate during exposure. The master can be used multiple times with best resolution about 1.0 µm, and overlay accuracy of 0.5 µm. The Gen 2 model runs in a more manual mode and has SCIL (substrate conformal imprint lithography) Imprint capability and the Gen 4 model is a newer version with more automation capabilities.
Resolution 1 µm
Overlay 1 µm
Contact Print
Courtesy Huang/Cameron
Contact Print
Courtesy Rogosky
Equipment
MABA6 Gen 2 with SCIL
Equipment
Karl Suss MABA6 Gen 4
Karl Suss MABA6 Gen 2 and Gen 4
- Double objective optical microscope
- Wafer sizes from pieces to 6 inch
- Unfiltered Hg (mercury) lamp exposure 8 mW/cm2 @ 365 nm Hg I-line
- Top and Bottom side optical alignment
- Mask sizes of 4, 5, and 7 inches
- Vacuum, hard, proximity, and soft contact modes