A doctoral student in materials science and engineering, in the Nanofab with the Temescal. Image: Penn State
Equipment
Instrument DOI: 10.60551/pgd1-xe8
| Multiple Fixture Options Available |
MFC Controlled Gas Inlet |
Materials Processed |
- Precision lift-off deposition fixtures (TP-8 & HULA fixtures)
- Sample mounting area for up to five 150mm dia. substrates
- Batch conformal coating fixture (HSP Fixture)
- Sample mounting area for up to:
- Six 150mm dia. substrates and
- Twelve 100mm substrates and
- Twelve 50mm substrates
- Fast thick film deposition
- Up to 1 micron in 5 min (40A/sec)
- Variable angle coating fixture
- Sample mounting area for up to:
- One 150mm dia. substrate
- Auto flipping fixture for double-sided coating.
- Sample mounting area for up to:
- Two 200mm dia. substrate
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- For O2 bleeding to improve quality of deposited oxides.
3 Quartz Heat Lamps
- For chamber heating up to 300°C
- 8 pocket e-gun source:
- 10 kW power supply
- Strong permanent magnet design reduces BSE and electron damage to photoresists
Single resistive (thermal) source
Fully integrated, recipe-driven process and vacuum control user interface
- Datalog /Historical log
- captures over 200 variables
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- Alumina (Al2O3)
- Aluminum (Al)
- Chromium (Cr)
- Cobalt (Co)
- Copper (Cu)
- Germanium (Ge)
- Gold (Au)
- Iron (Fe)
- Molybdenum (Mo)
- Nichrome (NiCr)
- Nickel (Ni)
- Palladium (Pd)
- Permalloy (80% Ni/20% Fe)
- Platinum (Pt)
- Rhenium (Re)
- Silicon (Si)
- Silicon Dioxide (SiO2)
- Silver (Ag)
- Tantalum (Ta)
- Titanium (Ti)
- Titanium Dioxide (TiO2)
- Tungsten (W)
- Ytterbium Oxide (Yb2O3)
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Instrument DOI: 10.60551/a2cg-2c84
The Kurt J. Lesker Lab-18 evaporator is computer controlled, recipe-driven, dual-thermal and 4-pocket e-beam deposition system. The system employs a load lock design that supports substrates up to 6" in diameter and substrate cooling down to -20°C with rotation capabilities. A Kaufman-Robinson ion source is also available on the system.
| Materials Available: |
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- Alumina (Al2O3)
- Aluminum (Al)
- Chromium (Cr)
- Cobalt (C0)
- Copper (Cu)
- Germanium (Ge)
- Gold (Au)
- Iron (Fe)
- Molybdenum (Mo)
- Nichrome (NiCr)
- Nicel (Ni)
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- Palladium (Pd)
- Platinum (Pt)
- Silicon (Si)
- Silcon Dioxide (SiO2)
- Silver (Ag)
- Tatalum (Ta)
- Titanium (Ti)
- Titanium Dioxide (TiO2)
- Tungsten (W)
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Parylene Thermal Evaporator
The Specialty Coating Systems is a dedicated parylene evaporator that deposits a totally conformal film. Parylene is a chemically inert polymer that has many great electrical, optical, mechanical, and biological properties. Several different types of parylene are stocked.
| Coatings |
Materials |
Applications |
Additional Resources |
- Room Temperature Deposition
- Conformal coating
- Inert and Chemically Resistant
- Clear to Opaque
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Parylene Dimers from Specialty Coating Systems
- Parylene C
- Parylene D
- Parylene N
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- Conformal Coating of Printed Circuit Boards for Protection Against Moisture and Corrosion
- Surface Passivation and Environmental Protection of Semiconductor Devices
- Conformal Coating of Biomedical Devices for Environmental Protection and Electrical Insulation
- Parylene has found acceptance in a myriad of industrial, aerospace, chemical, automotive, consumer, pharmaceutical, and defense applications
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