Image: Woollam M-2000F Focused Beam Spectroscopic Ellipsometer
Woolllam M-2000XF-193 is a focused beam fixed angle ellipsometer. Specs are as follows:
- Fixed incident angle: 65°
- Spot size of 25µm x 60 µm
- Spectral range: 193-1000nm
- Automated mapping stage: 200mmX200mm
Typical applications
- Thin film thickness measurements including a variety of materials, including dielectrics, organics, semiconductors, and even metal layers
- Measure film as thin as a fraction of a nanometer
- Measure film thickness up to 50 µm for dielectrics, up to 50 nm for absorbing films like metal
- Measure film with multi-layer of different materials
- Measure refractive index
- Mapping thickness uniformity on wafers up to 8”
- Measure film thickness on patterned samples